BAKWAN, M. A.; PRASETYA, S.; SUSANTO, I. Perancangan Chamber dari DC Magnetron Sputtering. Prosiding Seminar Nasional Teknik Mesin, [S. l.], v. 12, n. 1, p. 574–581, 2022. Disponível em: https://prosiding.pnj.ac.id/sntm/article/view/81. Acesso em: 1 jul. 2024.